3.4 Functional procedures |
The vacuum pump system evacuates the attached vacuum chamber according to a specified pressure curve. The vacuum pump system achieves each data point in the function in sequence. ![]() The following entries must be made for each data point: • Amount of time from previous data point • Setpoint pressure • Options: - no action - step - automatic - automatic+ - coolant valve open (W) - coolant valveclose ( The values can be entered either through the table or through the chart. ![]() Entry through the chart: • Insert data point: Right-click on the insertion position and select the desired action from the menu that appears. • Shift data point: Click on the data point and move it as desired. • Delete data point / specify options: Right-click on the data point and select the desired action from the menu that appears. Or define the options by double-clicking on the corresponding field in the "Option" column. A menu will open where you can select desired action. The number of repetitions for the function can be defined in the first blank line underneath the entered data points. Double-click on the field in the "Option" column to open a menu with the entry REPEAT. If this function is activated, you can enter the desired number of repeats in the "p[..]” column. To delete a data point, remove its entry from the dt column. The subsequent data points will be automatically moved up. The vacuum pump system saves 10 different functions. Left-click on the arrow above the table shows a menu where you can select the desired function number. ![]() |